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Epitaxial ultrathin NbN superconducting films for Terahertz application
陳澤潤
研究技師
陳澤潤的相片
辦公室:1020
電話: +886-2-2366-5350
傳真: +886-2-2367-7849
電子信箱: tjchen_replace2@_asiaa.sinica.edu.tw

學經歷

  • Senior Research Engineer,ASIAA (2018~ 迄今)
  • Associate Research Engineer, ASIAA (2007~2018)
  • Specialist, ASIAA (2003~2007)
  • Production Manager, Intelligant Epitaxy Technology (2002~2003)
  • Engineer, Optolectronics & Systems Laboratory (ITRI) (1996~2002)
  • Senior Research Specialist, Highlight Optoelectronic Corp. (1994~1996)
  • Engineer Section Manager, Taiwan Tech Corp. (1991~1994)
  • Package Engineer, Texas Instrument Corp. (1989~1991)
  • B.S., Physics, National Tsing Hua University, Taiwan ROC (1989)

研究興趣

My research are mainly related to superconductivity devices. The fabrication of SIS mixers for SMART telescopes and the development of new fabricating process are my major works. I also manage the operation of the clean room at NTHU from 2003 to 2013.and Since 2014 the mixer chip lab was moved from NTHU to NTU. Now We have three sputter systems, DUV mask aligner, and ICP-RIE system in the laboratory.

The fabricating process of SIS mixers with quantum noise limit performance for the frequency range 150GHz-850GHz has been developed. Since May 2016, we start to develop a new mixer structure Nb/Al/AlOx/Al/Nb, we found it can get better good quality ,high Jc and easy Jc control than old structure. we changed the top Al layer thickness and reduced the oxidiation level to get a 24KA/cm^2 Jc and over 10 quality factor(lot no.: SAO240-1-7). it broken the Jc record on this lab. But it still has low gap voltage problem, we continue to figure out it. Many kinds of processes can be done in our laboratory that could lead to the development of novel devices for Taiwan and worldwide research groups. To keep the operation of laboratory and mixer chip process smoothly is my major job.

期刊論文(中研院就職期間發表)

  1. Zeng L; Lu W-C; Grimes PK; Chen T-J; Chang Y-P; …; Wang M-J, "A Silicon Chip-Based Waveguide Directional Coupler for Terahertz Applications" , IEEE Trans THz Sci Technol: 10(6), 698-703, Nov, 2020 [SCI] ( ADS | Fulltext )
  2. Chang HW; Wang CL; Huang YR; Chen TJ; Wang MJ, "Growth and characterization of few unit-cell NbN superconducting films on 3C-SiC/Si substrate" , Supercond Sci Tech: 30, 115010, Nov, 2017 [SCI] ( ADS | Fulltext )
  3. Zhang W; Zhong JQ; Miao W; ...; Chen TJ; Wang MJ, "Electrical Characteristics of Superconducting Ti Transition Edge Sensors" , J Low Temp Phys: 184(1-2), 11-16, July, 2016 [SCI] ( ADS | Fulltext )
  4. Lin HT; Wu S-L; Wang J-W; Chen T-J; Wang M-J; et al., "Determination of the London penetration depth of FeSe0.3Te0.7 thin films by scanning SQUID microscope" , Supercond Sci Tech: 28(8), 085006, July 1, 2015 [SCI] ( ADS | Fulltext )
  5. Tang C-C; Lin H-T; Wu S-L; Chen T-J; Wang M-J; et al., "An interchangeable scanning Hall probe/scanning SQUID microscope" , Rev Sci Instrum: 85, 083707, Aug, 2014 [SCI] ( ADS | Fulltext )
  6. Liu K-Y; Wang MJ; Li C-T; Chen T-J; Shi S-C, "Development of a Dual Polarization SIS Mixer with a Planar Orthomode Transducer at 350 GHz" , IEEE T Appl Supercon: 23(3), 1400705, June, 2013 [SCI] ( ADS | Fulltext )
  7. Li C-T; Liu K-Yu; Lu W-C; Chiu C-P; Chen T-J; Chen C-W; Chang Y-C; Wang M-J; Shi S-C, "Development of 460 GHz and Dual Polarization SIS Mixers for the Submillimeter Array" , IEEE T Appl Supercon: 21(3), 654-658, June, 2011 [SCI] ( ADS | Fulltext )
  8. Li J; Shi S-C; Liu D; ...; Wang M-J; Chen T-J; Chen C-W; Lu W-C; Chiu C-P; Chang H-H, "Noise and Bandwidth of 0.5-THz Twin Vertically Stacked SIS Junctions" , IEEE T Appl Supercon: 21(3), 663-666, June, 2011 [SCI] ( ADS | Fulltext )
  9. Wu SL; Wang MJ; Chen TJ; et al., "The study of distributions and movements of vortices in superconducting thin films by using an Scanning SQUID Microscope" , Physica C: 470, S879-S881, Dec, 2010 [SCI] ( ADS | Fulltext )
電話: 886-2-3365-2200 傳真: 886-2-2367-7849
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台北市10617羅斯福路四段1號 中央研究院/台灣大學天文數學館11樓